This 5X8mm PSC circuit on a wafer vintage 1987 was photographed using the earlier version of the S-planar 25mm 1.6.
Resolution is impressive.
Lens Zeiss S-Planar 25mm 1.6.
Design lighting 5460 e-line; Actual lighting: green filter on flash.
Sony A7R II FF
FOV 5X8 mm
WD 18 mm; 220 mm extension; 10X
Zerenestacker Dmap; 2x2 stiched in PTGUI
BW conversion in LR
High res: https://www.easyzoom.com/image/199553/a ... ode=manage
Kind regards,
Chuong Nguyen
Zeiss S Planar 25 1.6 micro lithography lens reversed
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I love these lenses. I see the pixel dimensions are 16000 x 12000. Was this a pixel-shifted image, or did you shift the whole lens+camera, or did you shift the sensor?
Edited after noting that one of my questions was answered in the original post.
Edited after noting that one of my questions was answered in the original post.
Last edited by Lou Jost on Wed May 13, 2020 9:56 pm, edited 1 time in total.
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The camera/lens was shifted for a 2x2 stitched image. This lens has a IC of 80 mm. So I could shift the back only as well.Lou Jost wrote:I love these lenses. I see the pixel dimensions are 16000 x 12000. Was this a pixel-shifted image, or did you shift the whole lens+camera, or did you shift the sensor, or did you use a medium format sensor?
BTW, the green light make a huge different in IQ.
Chuong
Chuong,
Again excellent work and ... overwhelming resolution!!.
I did not know that these optics had been designed for such long wavelengths. I believed that the optics in this series were optimized for wavelengths less than 480nm.
Here is the link to the excellent Marco Cavina website where these lenses are discussed.
http://www.marcocavina.com/articoli_fot ... nglish.htm
But in the end I found a brochure:
From what Marco comments, this optic must have been produced at the beginning of the series, that is, approx. In 1974, ... about half a century!
Well, a few technical questions:
What is the distance between the lens and the camera sensor?
And again can you show the setup?
Best
Again excellent work and ... overwhelming resolution!!.
I did not know that these optics had been designed for such long wavelengths. I believed that the optics in this series were optimized for wavelengths less than 480nm.
Here is the link to the excellent Marco Cavina website where these lenses are discussed.
http://www.marcocavina.com/articoli_fot ... nglish.htm
But in the end I found a brochure:
From what Marco comments, this optic must have been produced at the beginning of the series, that is, approx. In 1974, ... about half a century!
Well, a few technical questions:
What is the distance between the lens and the camera sensor?
And again can you show the setup?
Best
Last edited by RDolz on Thu May 14, 2020 10:56 am, edited 1 time in total.
Ramón Dolz
The e-line of mercury was the main wavelength for the Ultra-Micro-Nikkors and early Zeiss. Several years ago Chuong posted the results of another Zeiss e-line stepper lens, but using white light. I was surprised that it was not too bad even with white light. But the 436nm and 405nm lenses seem to do really badly with white light.
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RDolz wrote:Chuong,
From what Marco comments, this optic must have been produced at the beginning of the series, that is, approx. In 1974, ... about half a century!
At that time, Zeiss West, Zeiss East (DDR), Nikon produce E-line lens for lithography. They are all better that Mitu 10 in visible light.
Well, a few technical questions:
Is the lens mounted in direct or reverse mode ?. What is the distance between the lens and the camera sensor?
Lens was mounted in reverse about 220 mm from the sensor.
And again can you show the setup?
Best
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Lou, This lens from Zeiss Jena has better resolution than the Mitu10 in white light with a large image circle. It must be from the East to compete with Zeiss West.Lou Jost wrote:The e-line of mercury was the main wavelength for the Ultra-Micro-Nikkors and early Zeiss. Several years ago Chuong posted the results of another Zeiss e-line stepper lens, but using white light. I was surprised that it was not too bad even with white light. But the 436nm and 405nm lenses seem to do really badly with white light.
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