I just found this interesting paper. It's old, so many of you have probably seen it, but it may be new for some.
http://www.lithoguru.com/scientist/lith ... a_2006.pdf
The Lithographic Lens: its history and evolution
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Re: The Lithographic Lens: its history and evolution
These are such amazing magnificent lenses. I am addicted to them even though they are not very practical....Even ones that used to cost $100000+ can be had on eBay for a few hundred dollars.