Monochromatic Microscopes?

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Lou Jost
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Re: Monochromatic Microscopes?

Post by Lou Jost »

there are some cool looking ones out there. like this one:
https://www.ebay.com/itm/Giant-Photolit ... Sw0w5eXuh4

also love the description:
"Optical properties: really really big"
at 38" x 20" x 10" they weren't kidding

I like their other descriptive line for that lens:

“The biggest, heaviest, expensivest-looking lens we've ever seen!”

RobertOToole
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Re: Monochromatic Microscopes?

Post by RobertOToole »

chris_ma wrote:
Thu Jan 07, 2021 2:54 pm
there are some cool looking ones out there. like this one:
https://www.ebay.com/itm/Giant-Photolit ... Sw0w5eXuh4

also love the description:
"Optical properties: really really big"
at 38" x 20" x 10" they weren't kidding :)

the zeiss website also has a cool looking one:
Image

I suspect that weights and costs a bit more :)
Some info from a Zeiss slideshow. Zeiss refers to them as projection lenses, they are just one part of the microlitho optical system.

The specs are from 10 years ago! Just noticed the 1000 kg spec :shock:

Come to think of it, I have lots of Nikon Microlitho optics images from the last trips to the Nikon Museum outside Tokyo.



Zeiss-1.jpg
Zeiss-2.jpg
zeiss-3.jpg

Lou Jost
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Re: Monochromatic Microscopes?

Post by Lou Jost »

Such beautiful optical technology.

RobertOToole
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Re: Monochromatic Microscopes?

Post by RobertOToole »

Lou Jost wrote:
Sat Jan 09, 2021 10:43 pm
Such beautiful optical technology.
Yes it is.

I still cant get over the 1080 kg!

Nikon has some awesome displays in Japan. I can just imagine what ASML is working on since Nikon doesn't compete any longer.

The current EUV technology uses reflected light/mirrors.

https://www.asml.com/en/products/euv-li ... n-nxe3400c

From the above:

Optics
The NXE:3400C features an all-reflective 4x reduction lens assembly from Zeiss with a maximum exposure field of 26 x 33 mm.

The system is equipped with projection optics with a numerical aperture (NA) of 0.33 and an illuminator with an operating range sigma of 0.06–1 to maintain high productivity while enabling low k1 and a resolution of 13 nm. In-situ measurement and corrections per wafer of the optics and stages enable maximum imaging, overlay and CDU performance for each wafer exposed when imaging at low k1.

03. Imaging performance
The NXE:3400C can achieve a dedicated chuck overlay of 1.4 nm and a matched-machine overlay of 1.5 nm.

RobertOToole
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Re: Monochromatic Microscopes?

Post by RobertOToole »

Lou Jost wrote:
Sat Jan 09, 2021 10:43 pm
Such beautiful optical technology.
Take a look at this...wow!


This video actually explains whats going on in the other two videos:


https://www.youtube.com/watch?v=f0gMdGrVteI&

EUV-2.jpg


https://www.youtube.com/watch?v=skUCP2f ... annel=ASML




and this:




https://www.youtube.com/watch?v=GBdMRUG ... annel=ASML


EUV-1.jpg

Lou Jost
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Re: Monochromatic Microscopes?

Post by Lou Jost »

I want one!!!!

That depiction of the light path is crazy. I had no idea things had gotten that complex.
projection optics with a numerical aperture (NA) of 0.33
I am a little surprised at the low NA. Some of my own visible-light photolithography lenses have larger NA. For example a 10x 0.38 for 436nm light. I am surprised that the NA would go backwards as technology advances.

Pau
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Re: Monochromatic Microscopes?

Post by Pau »

Lou Jost wrote:
Sun Jan 10, 2021 5:27 am
I am a little surprised at the low NA. ..
... I am surprised that the NA would go backwards as technology advances.
Well, what matters is resolution, not NA itself. The former generation with immersion optics had 1.35 NA and lower resolution, the key as you well know is the shorter wavelength, and the next generation will be 0.55 NA.

Electron microscopes have low NA *(hence the good depth of focus of SEM) but much shorter wavelength
Some of my own visible-light photolithography lenses have larger NA. For example a 10x 0.38 for 436nm light
Will be most interesting if you could show us some sample images taken with them

*around 0.012 for TEM!
Pau

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