Zeiss S Planar 25 1.6 micro lithography lens reversed

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chuong nguyen
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Joined: Thu Aug 18, 2011 9:48 pm

Zeiss S Planar 25 1.6 micro lithography lens reversed

Post by chuong nguyen »

This 5X8mm PSC circuit on a wafer vintage 1987 was photographed using the earlier version of the S-planar 25mm 1.6.

Resolution is impressive.
Image

Lens Zeiss S-Planar 25mm 1.6.
Design lighting 5460 e-line; Actual lighting: green filter on flash.
Sony A7R II FF
FOV 5X8 mm
WD 18 mm; 220 mm extension; 10X
Zerenestacker Dmap; 2x2 stiched in PTGUI
BW conversion in LR

High res: https://www.easyzoom.com/image/199553/a ... ode=manage

Kind regards,

Chuong Nguyen

Lou Jost
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Post by Lou Jost »

I love these lenses. I see the pixel dimensions are 16000 x 12000. Was this a pixel-shifted image, or did you shift the whole lens+camera, or did you shift the sensor?

Edited after noting that one of my questions was answered in the original post.
Last edited by Lou Jost on Wed May 13, 2020 9:56 pm, edited 1 time in total.

Smokedaddy
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Post by Smokedaddy »

Excellent image. I'm not familiar with that camera at all (and it's in my price range).

chuong nguyen
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Post by chuong nguyen »

Lou Jost wrote:I love these lenses. I see the pixel dimensions are 16000 x 12000. Was this a pixel-shifted image, or did you shift the whole lens+camera, or did you shift the sensor, or did you use a medium format sensor?
The camera/lens was shifted for a 2x2 stitched image. This lens has a IC of 80 mm. So I could shift the back only as well.

BTW, the green light make a huge different in IQ.

Chuong

RDolz
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Post by RDolz »

Chuong,

Again excellent work and ... overwhelming resolution!!.

I did not know that these optics had been designed for such long wavelengths. I believed that the optics in this series were optimized for wavelengths less than 480nm.

Here is the link to the excellent Marco Cavina website where these lenses are discussed.

http://www.marcocavina.com/articoli_fot ... nglish.htm

But in the end I found a brochure:

Image

From what Marco comments, this optic must have been produced at the beginning of the series, that is, approx. In 1974, ... about half a century!

Well, a few technical questions:

What is the distance between the lens and the camera sensor?

And again can you show the setup?

Best
Last edited by RDolz on Thu May 14, 2020 10:56 am, edited 1 time in total.
Ramón Dolz

Lou Jost
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Post by Lou Jost »

The e-line of mercury was the main wavelength for the Ultra-Micro-Nikkors and early Zeiss. Several years ago Chuong posted the results of another Zeiss e-line stepper lens, but using white light. I was surprised that it was not too bad even with white light. But the 436nm and 405nm lenses seem to do really badly with white light.

chuong nguyen
Posts: 46
Joined: Thu Aug 18, 2011 9:48 pm

Post by chuong nguyen »

RDolz wrote:Chuong,

From what Marco comments, this optic must have been produced at the beginning of the series, that is, approx. In 1974, ... about half a century!

At that time, Zeiss West, Zeiss East (DDR), Nikon produce E-line lens for lithography. They are all better that Mitu 10 in visible light.

Well, a few technical questions:

Is the lens mounted in direct or reverse mode ?. What is the distance between the lens and the camera sensor?

Lens was mounted in reverse about 220 mm from the sensor.

And again can you show the setup?

Best
Image

Image

chuong nguyen
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Joined: Thu Aug 18, 2011 9:48 pm

Post by chuong nguyen »

Lou Jost wrote:The e-line of mercury was the main wavelength for the Ultra-Micro-Nikkors and early Zeiss. Several years ago Chuong posted the results of another Zeiss e-line stepper lens, but using white light. I was surprised that it was not too bad even with white light. But the 436nm and 405nm lenses seem to do really badly with white light.
Lou, This lens from Zeiss Jena has better resolution than the Mitu10 in white light with a large image circle. It must be from the East to compete with Zeiss West.
Image

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Scarodactyl
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Post by Scarodactyl »

Impressive! How are working distance and color correction?

Lou Jost
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Post by Lou Jost »

Thanks for showing us that! I have not seen one of those before. Where did you find it?

chuong nguyen
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Post by chuong nguyen »

Scarodactyl wrote:Impressive! How are working distance and color correction?
The WD for these massive lenses from Zeiss Jena is about 1.5 mm.

This was taken with LED light.

Image

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